Universitat Rovira i Virgili

X-Ray Photolectron Spectroscopy (XPS/ESCA)

AVAILABLE FROM DECEMBER 2023

The X-ray photoelectron spectroscopy (XPS) or Electron Scattering for Chemical Analysis (ESCA) is a non-destructive technique for the chemical analysis of the elements (Z>2) present in the first 10nm of 'a sample. It is a unique technique for the chemical analysis of surfaces. The sample is excited by X-rays and this emits photoelectrons with different energies corresponding to the atomic orbital that emits them. According to the chemical environment of the atom, the energy of the emitted electrons changes slightly so that both the element and its chemical environment (with which other element it forms a bond) can be identified. The technique is qualitative and quantitative.


The technique can work in-operando in UHV (Ultra High Vacuum) or NAP (Near Ambient Pressure) conditions with a pressurized atmosphere of H2, O2 or CO2, both at room temperature and up to 900ºC. It has a high pressure chamber to perform treatments up to 20 bar and transfer the sample to the main chamber to be analyzed. It also has an evaporation chamber to deposit onto the sample and transfer it to the analysis chamber.


Samples can be of any type: powder (inorganic/organic), bulk (ceramics, sensors, metals, paints, thin layers) and liquid. It also allows samples to be introduced from a dry box or glove box.

SPECS Provenx NAP System

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