High-resolution scanning electron microscope (FESEM-FIB)

• Description

FESEM-FIB is a field emission scanning electron microscope that includes an electron beam and a focused ion beam (Ga).

This technique is used to obtain ultra-high resolution images, sample preparation for transmission electron microscopy and 3D characterization for any kind of materials, including magnetic and isolating specimens. It has an energy dispersive X-ray spectroscopy detector, a micromanipulator and 4 gas injector systems that allows the design of high resolution nano-structures or the milling of specific areas.

• Technology

The Scios 2 by FEI Company is characterized by:

• A NiCol (Non-Immersion Column) electron column with electrostatic lenses that allow ultra-high resolution, and suitable for magnetic specimens. It has 3 detectors into the column with high image contrast:
  • For compositional contrast imaging (Back Scattering Detector, BSD)
  • For high resolution imaging
  • For low energy secondary electrons imaging 
• Ion column: wide range of high voltages for the milling of large volumes, drift suppression for electrically charged specimens
• In chamber ETD secondary electrons detector
• Segmented backscattered electrons detector (CBS/ABS) for compositional and material contrast, and for the surface information and topographic contrast
• Segmented STEM detector (bright field, dark field and high-angle annular)
• Fully Automated micromanipulator
• X-ray detector

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• Applications

• Acquisition of ultra-high resolution images for a wide range of specimens, including magnetic and isolating materials
• Sample preparation (lamelas) of high quality and very specific areas for transmission microscopy
• Morphological and compositional information of specimens using various integrated detectors
• High quality and precise sub-superficial and 3D information using advanced software
• Realization of nanometric cross-sections in series for subsequent 3D tomography reconstruction
• Precise specimen navigation using a navigation camera and the mechanized 5 axes stage
• Chemical and crystallographic studies of microstructures
• Creation of new structures and modification of the existed ones using the FIB and the gas injector systems