Universitat Rovira i Virgili

High-resolution scanning electron microscope (FESEM-FIB)

FESEM-FIB is a field emission scanning electron microscope that includes an electron beam and a focused ion beam (Ga).

This technique is used to obtain ultra-high resolution images, sample preparation for transmission electron microscopy and 3D characterization for any kind of materials, including magnetic and isolating specimens. It has an energy dispersive X-ray spectroscopy detector, a micromanipulator and 4 gas injector systems that allows the design of high resolution nano-structures or the milling of specific areas.

The Scios 2 by FEI Company is characterized by:


  • This project is co-financed by the European Regional Development Fund of the European Union within the framework of the State Plan for Scientific and Technical Research and Innovation 2017-2020, with an eligible expense of 826.000€


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