Universitat Rovira i Virgili

Environmental scanning electron microscopy (ESEM) with X-ray microanalysis

This microscope, the Quanta 600 from FEI company, uses an electron beam to form the image. It is characterized by its high resolution (3 nm) and its great depth of field that allows the focusing of different heights of the sample at the same time. Due to the electron-matter interaction, different signals that lead to different results are produced: topographic image, atomic number image contrast, energy dispersive X-ray spectroscopy, etc.

Conductive, non-conductive and incompatible with high vacuum specimens can be study using the three pressure modes that range from 10-5 mbar to 26 mbar (2600 Pa) with a resolution of 3nm. Humidity studies can be performed together with the Peltier stage from -20 °C a 50 °C. The microscope also has an oven that reaches temperatures up to 1500 °C, which allows to make temperature studies with the possibility to connect several gases. TEM grids which require to maintain the sample humidity can be observed with the Wet-STEM detector without the necessity of fixation, dehydration and inclusion. 

Types of measurements achievable with the ESEM:



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